course syllabus

C OUR SE SYLLA BUS
YEDITEPE UNIVERSITY
2013/2014-2
FACULTY OF ENGINEERING AND ARCHITECTURE
Course Code-Name ME 462 – Introduction to MEMS Fabrication
Section
1
1
Course Schedule
Instructor’s Name
Phone
E-mail
Office Hours
Assistant’s
Activity
Day&Time
LEC
Tue. 13:00 60 min.
LEC
Thu. 14:00 120 min.
Dr. Nezih Topaloğlu
x1753
[email protected]
Please check the instructor web page
Name N/A
Phone
E-mail
Textbook
“Foundations of MEMS: International Edition”, Chang Liu, 2011, Prentice Hall
Reference Textbooks:
 “Microsystem Design”, Stephen D. Senturia, Kluwer Academic
Publishers, 2003
 “Fundamentals of Microfabrication”, M. Madou, CRC Press, 1997.
Course website
http://me.yeditepe.edu.tr/courses/me462/
Recommended
Prerequisites
A general knowledge of mechanical and electrical engineering concepts
(strength of materials, beam analysis, heat transfer, finite element analysis,
analog electrical circuits) and mathematics
Attendance
80% minimum attendance is required
Additional Remarks

Academic honesty: You should do all assignments yourself although
discussion with other people is possible.
 Late assignments will be accepted, but 15% will be deducted for each
day it is late.
 Technical paper reading assignments will be given, and students are
expected to come to class having completed the assigned reading. An
in-class quiz (or an assignment which will be collected in lecture) will
be given and graded.
 Make-up exams will only be given to those students who have missed a
midterm exam because of a valid and documented excuse.
 A separate document will describe the detailed requirements for the
term project. The project is meant to develop skills in library
research, critical thinking, device design and analysis, technical
writing skills and presentation skills.
 Smart phones and cell phones are not welcome in ME 462 lectures. As a
courtesy to the instructor and to your fellow students, turn them off
before coming to class.
 Please respect the instructor’s office hours. If you have questions,
please come during my office hours. If they are not accommodating,
please set up an appointment with me via email.
C OUR SE SYLLA BUS
YEDITEPE UNIVERSITY
FACULTY OF ENGINEERING AND ARCHITECTURE
2013/2014-2
Course CodeME 462 - Introduction to MEMS Fabrication
Name
Grading
Assignments
Midterm
Tech. paper readings
Term project
Final

Course
Outline



Course
Objectives
20%
20%
20%
20%
25%
An overview of microfabrication methods: Thin-film deposition,
oxidation, lithography, bulk and surface micromachining.
MEMS Foundry processes.
Basic MEMS governing equations in mechanical, electrical and thermal
domain.
Design, analysis and characterization of basic MEMS devices
On successful completion of this course, students will be able to:




Understand the basics of MEMS
Develop familiarity with common microfabrication methods
Develop familiarity with the steps required for design and analysis of a
MEMS device
Read and understand emerging technical literature about the subject
Course Outcomes
i.
iv.
vi.
vii.
viii.
Adequate knowledge in mathematics, science and engineering subjects pertaining to the
relevant discipline; ability to use theoretical and applied information in these areas to
model and solve engineering problems.
(Matematik, fen bilimleri ve kendi dalları ile ilgili mühendislik konularında yeterli bilgi birikimi;
bu alanlardaki kuramsal ve uygulamalı bilgileri mühendislik problemlerini modelleme ve çözme
için uygulayabilme becerisi.)
Ability to devise, select, and use modern techniques and tools needed for engineering
practice; ability to employ information technologies effectively.
(Mühendislik uygulamaları için gerekli olan modern teknik ve araçları geliştirme, seçme ve
kullanma becerisi; bilişim teknolojilerini etkin bir şekilde kullanma becerisi.)
Ability to work efficiently in intra-disciplinary and multi-disciplinary teams; ability to
work individually.
(Disiplin içi ve çok disiplinli takımlarda etkin biçimde çalışabilme becerisi; bireysel çalışma
becerisi.)
Ability to communicate effectively both orally and in writing; knowledge of a minimum of
one foreign language.
(Sözlü ve yazılı etkin iletişim kurma becerisi; en az bir yabancı dil bilgisi.)
Recognition of the need for lifelong learning; ability to access information, to follow
developments in science and technology, and to continue to educate him/herself.
(Yaşam boyu öğrenmenin gerekliliği bilinci; bilgiye erişebilme, bilim ve teknolojideki
gelişmeleri izleme ve kendini sürekli yenileme becerisi.)